ISO 22493:2014-ed.2.0

Detailinformationen

Bezeichnung: ISO 22493:2014-ed.2.0

Ausgabedatum: 09.04.2014

Seiten: 20

Land: Internationale technische Norm

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Annotation

Description / Abstract: ISO 22493:2014 defines terms used in the practice of scanning electron microscopy (SEM). It covers both general and specific concepts, classified according to their hierarchy in a systematic order, with those terms that have already been defined in ISO 23833 also included, where appropriate. ISO 22493:2014is applicable to all standardization documents relevant to the practice of SEM. In addition, some clauses of ISO 22493:2014 are applicable to documents relevant to related fields (e.g. EPMA, AEM, EDS) for the definition of terms which are relevant to such fields.