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Cleanrooms and associated controlled environments - Part 2: Specifications for testing and monitoring to prove continued compliance with ISO 14644-1
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Cleanrooms and associated controlled environments - Part 3: Test methods
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Cleanrooms and associated controlled environments - Part 4: Design, construction and start-up
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Cleanrooms and associated controlled environments - Part 5: Operations
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Cleanrooms and associated controlled environments - Part 8: Classification of airborne molecular contamination
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Cleanrooms and associated controlled environments - Part 8: Classification of air cleanliness by chemical concentration (ACC)
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Cleanrooms and associated controlled environments - Part 9: Classification of surface cleanliness by particle concentration
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Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration
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Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications
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Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration
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