Withdrawn | Published: 01/05/2018

ASTM E2246-11(2018) Withdrawn

Standard Test Method for Strain Gradient Measurements of Thin, Reflecting Films Using an Optical Interferometer (Withdrawn 2023)

Available languages: English

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Detail information

Designation: ASTM E2246-11(2018)

Publication date: 01/05/2018

Pages: 21

Note: Withdrawn

Country: American technical standard

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Keywords:
cantilevers, combined standard uncertainty, fixed-fixed beams, interferometry, length measurements, microelectromechanical systems, MEMS, polysilicon, residual strain, round robin, stiction, strain gradient, test structure,, ICS Number Code 37.040.20 (Photographic paper, film and plates. Cartridges)

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