ASTM F1397-93(2005) Withdrawn

Detail information

Designation: ASTM F1397-93(2005)

Publication date: 10/06/1999

Pages: 10

Note: Withdrawn

Country: American technical standard

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Anotation

Keywords:
Argon, Flow and flow rate-semiconductor applications, Gas distribution systems, Moisture analysis, Nitrogen, Response time, Semiconductor clean rooms, Spool piece, Stainless steel-gas distribution systems, moisture contribution by gas distribution system components, using, stainless steel spool piece at elevated ambient temperatures [<,=]50°C, test, ICS Number Code 23.040.01 (Pipeline components in general. Pipelines)