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Active standard | Published: 30/04/2025
BS IEC 62047-46:2025
Semiconductor devices. Micro-electromechanical devices. Silicon based MEMS fabrication technology. Measurement method of tensile strength of nanoscale thickness membrane.
Available languages: English
Available design: PDF - Immediate download, Print design
from 214.40 USD
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Detail information
Designation: BS IEC 62047-46:2025
Publication date: 30/04/2025
Pages: 18
Country: British technical standard
Where to buy?
You can buy at www.mystandards.bizAnotation
ISBN: 978 0 539 21850 3 Status: DefinitivePopular Publishers
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