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Active standard | Published: 01/08/2025
ČSN EN ISO 25178-603
Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments
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Detail information
Designation: ČSN EN ISO 25178-603
Publication date: 01/08/2025
Pages: 32
Country: Czech technical standard
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This document specifies the design and metrological characteristics of phase shifting interferometry (PSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurementsPopular Publishers
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