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Active standard | Published: 01/08/2025
ČSN EN ISO 25178-604
Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments
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Detail information
Designation: ČSN EN ISO 25178-604
Publication date: 01/08/2025
Pages: 36
Country: Czech technical standard
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This document specifies the design and metrological characteristics of coherence scanning interferometry (CSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from surface topography data, the methods described in this document are also applicable to profiling measurementsPopular Publishers
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