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Active standard | Published: 13/09/1999
GB/T 17866-1999
Guideline for programmed defect masks and benchmark procedures for sensitivity analysisof mask defect inspection systems
Available languages: English, Chinese
Available design: electronic design (pdf), Print design
from 418.80 USD
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Detail information
Designation: GB/T 17866-1999
Publication date: 13/09/1999
Pages: 0
Country: Chinese technical standard
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