IEC/TS 62607-6-5-ed.1.0

Detail information

Designation: IEC/TS 62607-6-5-ed.1.0

Publication date: 14/12/2022

Pages: 23

Country: International technical standard

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Anotation

IEC TS 62607-6-5:2022(E) establishes a standardized method to determine the key control characteristics

• contact resistance, and
• sheet resistance

for graphene-based materials and other two-dimensional materials by a

• transmission line measurement.

The method uses test structures applied to the 2D material by photolithographic methods consisting of several metal electrodes with increasing spacing between the electrodes. By a measurement of the voltage drop between different pairs of electrodes, sheet resistance and contact resistance can be calculated.

• The method can be applied to any other two-dimensional materials which are subject to electrical metal contact on top of the materials.
• The method provides accurate and reproducible results, if the electrical contact formed between the two-dimensional material and the metal electrodes provides ohmic contact property.