Active standard | Published: 27/04/2026

IEC/TS 62876-3-2-ed.1.0

Nanomanufacturing - Reliability and durability assessment - Part 3-2: Graphene - Ellipsometry measurement of graphene

Available languages: English

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Detail information

Designation: IEC/TS 62876-3-2-ed.1.0

Publication date: 27/04/2026

Pages: 18

Country: International technical standard

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Anotation

IEC TS 62876-3-2:2026 which is a Technical Specification, establishes a standardized method to determine • volume fraction for graphene by • ellipsometry. Thickness/composition measurements are evaluated by ellipsometry before and after the stability test. By model calculation, the volume fraction of graphene can be evaluated. Since the test method is non-destructive, it can be used to assess the reliability and durability of graphene films on production lines. • For graphene-capped copper for Cu interconnects in a semiconductor engineering, for example, the reliability and durability of the capping layer are evaluated. • Gas sensors, gas barriers, transparent electrodes for solar cells, etc. are being researched and developed. • This method is useful for non-destructive and quantitative evaluation of the volume fraction of graphene to assess the reliability and durability.

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