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Active standard | Published: 28/02/2012
IEC 62047-10-ed.1.0/Cor.1 Correction
Corrigendum 1 - Semiconductor devices - Micro-electromechanical devices - Part 10: Micro-pillar compression test for MEMS materials
(Corrigendum 1 - Dispositifs a semiconducteurs - Dispositifs microelectromecaniques - Partie 10: Essai de compression utilisant la technique des micro-piliers pour les materiaux des MEMS)
Available languages: English and French
Available design: electronic design (pdf), Print design, CD-ROM
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Detail information
Designation: IEC 62047-10-ed.1.0/Cor.1
Publication date: 28/02/2012
Pages: 0
Note: Correction
Country: International technical standard
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