Active standard | Published: 17/07/2013

IEC 62047-11-ed.1.0

Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems
(Dispositifs a semiconducteurs - Dispositifs microelectromecaniques - Partie 11: Methode d´essai pour les coefficients de dilatation thermique lineaire des materiaux autonomes pour systemes microelectromecaniques)

Available languages: English and French

Available design: electronic design (pdf), Print design, CD-ROM

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Detail information

Designation: IEC 62047-11-ed.1.0

Publication date: 17/07/2013

Pages: 38

Country: International technical standard

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Anotation

IEC 62047-11:2013 specifies the test method to measure the linear thermal expansion coefficients (CLTE) of thin free-standing solid (metallic, ceramic, polymeric, etc.) micro-electro-mechanical system (MEMS) materials with length between 0,1 mm and 1 mm and width between 10 micrometre and 1 mm and thickness between 0,1 micrometre and 1 mm, which are main structural materials used for MEMS, micromachines and others. This test method is applicable for the CLTE measurement in the temperature range from room temperature to 30 % of a materials melting temperature. La CEI 62047-11:2013 definit la methode dessai pour mesurer les coefficients de dilatation thermique lineaire (CLTE) de materiaux de systemes micro-electromecaniques (MEMS) solides autonomes minces (metalliques, ceramiques, polymeres, etc.) dont la longueur est comprise entre 0,1 mm et 1 mm, la largeur entre 10 micrometre et 1 mm et lepaisseur entre 0,1 micrometre et 1 mm, qui sont les materiaux structurels principaux utilises pour les MEMS, les micromachines et autres. Cette methode dessai peut sappliquer a la mesure des CLTE dans la gamme de temperatures allant de la temperature ambiante jusqua 30 % de la temperature de fusion du materiau.

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