Active standard | Published: 19/06/2014

IEC 62047-21-ed.1.0

Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson´s ratio of thin film MEMS materials
(Dispositifs a semiconducteurs - Dispositifs microelectromecaniques - Partie 21: Methode d´essai relative au coefficient de Poisson des materiaux MEMS en couche mince)

Available languages: English and French

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Detail information

Designation: IEC 62047-21-ed.1.0

Publication date: 19/06/2014

Pages: 26

Country: International technical standard

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Anotation

IEC 62047-21:2014 specifies the determination of Poissons ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 µm. LIEC 62047-21:2014 specifie la determination du coefficient de Poisson a partir des resultats obtenus par lapplication dessais de charges uniaxiales et biaxiales aux materiaux pour systemes microelectromecaniques (MEMS, Micro-Electrical-Mechanical Systems) a couche mince dont les longueurs et les largeurs sont inferieures a 10 mm et les epaisseurs sont inferieures a 10 µm.

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