Active standard | Published: 06/03/2013

ISO/TR 19319:2013-ed.2.0

Surface chemical analysis — Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods
(Analyse chimique des surfaces — Approche fondamentale pour la détermination de la résolution latérale et de la netteté par des méthodes a base de faisceau)

Available languages: English

Available design: electronic design (pdf), Print design

from 336.20 USD show on eshop

Detail information

Designation: ISO/TR 19319:2013-ed.2.0

Publication date: 06/03/2013

Pages: 116

Country: International technical standard

Where to buy?

You can buy at www.mystandards.biz

Anotation

Description / Abstract: ISO/TR 19319:2013 describes: functions and their relevance to lateral resolution: point spread function (PSF), line spread function (LSF), edge spread function (ESF), modulation transfer function (MTF) and contrast transfer function (CTF); experimental methods for the determination of lateral resolution and parameters related to lateral resolution: imaging of a narrow stripe, sharp edge and square-wave gratings; physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy.

Popular Publishers

full catalog