Active standard | Published: 07/06/2024

ISO 14594:2024-ed.3.0

Microbeam analysis — Electron probe microanalysis — Guidelines for the determination of experimental parameters for wavelength dispersive spectroscopy
(Analyse par microfaisceaux — Analyse par microsonde électronique (Microsonde de Castaing) — Lignes directrices pour la détermination des parametres expérimentaux pour la spectrométrie a dispersion de longueur d´onde)

Available languages: English

Available design: electronic design (pdf), Print design

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Detail information

Designation: ISO 14594:2024-ed.3.0

Publication date: 07/06/2024

Pages: 18

Country: International technical standard

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Description / Abstract: This document gives general guidelines for the determination of experimental parameters relating to the electron probe, the wavelength spectrometer, and the specimen that need to be taken into account when carrying out electron probe microanalysis. It also defines procedures for the determination of probe current, probe diameter, dead time, wavelength resolution, background, analysis area, analysis depth, and analysis volume. This document is applicable for the analysis of a well-polished specimen using normal beam incidence. This document does not apply to energy dispersive X-ray spectroscopy.

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