Active standard | Published: 30/08/2018

ISO 14644-12:2018

Cleanrooms and associated controlled environments — Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration
(Salles propres et environnements maîtrisés apparentés — Partie 12: Spécification de la propreté de l´air en fonction de la concentration des nanoparticules)

Available languages: English

Available design: electronic design (pdf), Print design

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Detail information

Designation: ISO 14644-12:2018

Publication date: 30/08/2018

Pages: 11

Country: International technical standard

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Anotation

Description / Abstract: This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles. For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less ? "nanoscale" ? are considered. The monitoring given in this document is for use mainly in "operational" states. NOTE 1 For the purposes of this document, reference is made to "nanoscale particles", which means all nano-objects having one (nanoplate), two (nanofibre) or three (nanoparticle) dimensions in the nanoscale. NOTE 2 As a consequence, the specifications for monitoring air cleanliness by nanoscale particle concentration of the cleanroom in operational state also considers process specifics, e.g., used equipment, personnel behaviour, etc. NOTE 3 Health and safety considerations are excluded from this document.

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