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Active standard | Published: 12/02/2021
ISO 14644-17:2021
Cleanrooms and associated controlled environments — Part 17: Particle deposition rate applications
(Salles propres et environnements maîtrisés apparentés — Partie 17: Applications de taux de dépôt de particules)
Available languages: English, French
Available design: electronic design (pdf), Print design
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Detail information
Designation: ISO 14644-17:2021
Publication date: 12/02/2021
Pages: 26
Country: International technical standard
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