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Active standard | Published: 12/02/2021
ISO 15632:2021-ed.3.0
Microbeam analysis — Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers (EDS) for use with a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA)
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Detail information
Designation: ISO 15632:2021-ed.3.0
Publication date: 12/02/2021
Pages: 13
Country: International technical standard
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