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Active standard | Published: 11/05/2021
ISO 18114:2021-ed.2.0
Surface chemical analysis — Secondary-ion mass spectrometry — Determination of relative sensitivity factors from ion-implanted reference materials
(Analyse chimique des surfaces — Spectrométrie de masse des ions secondaires — Détermination des facteurs de sensibilité relative a l´aide de matériaux de référence a ions implantés)
Available languages: English
Available design: electronic design (pdf), Print design
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Detail information
Designation: ISO 18114:2021-ed.2.0
Publication date: 11/05/2021
Pages: 4
Country: International technical standard
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You can buy at www.mystandards.bizAnotation
Description / Abstract: This document specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials. The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.Popular Publishers
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