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Active standard | Published: 14/01/2019
ISO 18516:2019-ed.2.0
Surface chemical analysis — Determination of lateral resolution and sharpness in beam based methods with a range from nanometres to micrometres
(Analyse chimique des surfaces — Détermination de la résolution latérale et de la netteté par des méthodes a base de faisceau utilisant une gamme allant des nanometres aux micrometres)
Available languages: English
Available design: electronic design (pdf), Print design
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Detail information
Designation: ISO 18516:2019-ed.2.0
Publication date: 14/01/2019
Pages: 53
Country: International technical standard
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