Active standard | Published: 16/10/2023

ISO 29301:2023-ed.3.0

Microbeam analysis — Analytical electron microscopy — Methods for calibrating image magnification by using reference materials with periodic structures
(Analyse par microfaisceaux — Microscopie électronique analytique — Méthodes d´étalonnage du grandissement d´image au moyen de matériaux de référence de structures périodiques)

Available languages: English

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Detail information

Designation: ISO 29301:2023-ed.3.0

Publication date: 16/10/2023

Pages: 44

Country: International technical standard

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Anotation

Description / Abstract: This document specifies a calibration procedure applicable to images recorded over a wide magnification range in a transmission electron microscope (TEM). The reference materials used for calibration possess a periodic structure, such as a diffraction grating replica, a super-lattice structure of semiconductor or an analysing crystal for X-ray analysis, and a crystal lattice image of carbon, gold or silicon. This document is applicable to the magnification of the TEM image recorded on a photographic film, or an imaging plate, or detected by an image sensor built into a digital camera. This document also refers to the calibration of a scale bar. This document does not apply to the dedicated critical dimension measurement TEM (CD-TEM) and the scanning transmission electron microscope (STEM).

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