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Active standard | Published: 23/03/2020
JIS C5630-30:2020
Semiconductor devices -- Micro-electromechanical devices -- Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film
Available languages: Japanese
Available design: electronic design (pdf), Print design
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Detail information
Designation: JIS C5630-30:2020
Publication date: 23/03/2020
Pages: 16
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