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Active standard | Published: 22/11/2021
JIS K0159:2021
Surface chemical analysis -- Scanning-probe microscopy -- Determination of geometric quantities using SPM: Calibration of measuring systems
Available languages: Japanese
Available design: electronic design (pdf), Print design
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Detail information
Designation: JIS K0159:2021
Publication date: 22/11/2021
Pages: 62
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