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Active standard | Published: 20/04/2012
JIS K0169:2012
Surface chemical analysis -- Secondary-ion mass spectrometry (SIMS) -- Method for estimating depth resolution parameters with multiple delta-layer reference materials
Available languages: Japanese
Available design: electronic design (pdf), Print design
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Detail information
Designation: JIS K0169:2012
Publication date: 20/04/2012
Pages: 8
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