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Active standard | Published: 01/01/2017
UNE-EN 62047-25:2016
Semiconductor devices - Micro-electromechanical devices - Part 25: Silicon based MEMS fabrication technology - Measurement method of pull-press and shearing strength of micro bonding area (Endorsed by Asociación Espanola de Normalización in January of 2017.)
Available languages: English
Available design: electronic design (pdf), Print design
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Detail information
Designation: UNE-EN 62047-25:2016
Publication date: 01/01/2017
Pages: 31
Country: Spanish technical standard
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