IEC 62047-42-ed.1.0

Podrobné informácie

Označenie: IEC 62047-42-ed.1.0

Dátum vydania: 16.09.2022

Stránok: 22

Krajina: Medzinárodná technická norma

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Anotácia

IEC 62047-42:2022 specifies measuring methods of electro-mechanical conversion characteristics of piezoelectric thin film on microcantilever, which is typical structure of actual micro sensors and micro actuators. In order to obtain actual and precise piezoelectric coefficient of the piezoelectric thin films with microdevice structures, and this document reports the schema to determine the characteristic parameters for consumer, industry or any other applications of piezoelectric devices. This document applies to piezoelectric thin films on microcantilever fabricated by MEMS process.