IEC 62047-44-ed.1.0

Detailinformationen

Bezeichnung: IEC 62047-44-ed.1.0

Ausgabedatum: 22.02.2024

Seiten: 19

Land: Internationale technische Norm

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Erhältlich auf www.technormen.de

Annotation

IEC 62047-44:2024 describes terminology, definitions and test methods that are used to evaluate and determine the dynamic performance of MEMS (Micro-Electromechanical Systems) resonant electric-field-sensitive devices. It also specifies sample requirements and test equipment for dynamic performances of MEMS resonant electric-field-sensitive devices. The statements made in this document are also applicable to MEMS resonant electric-field-sensitive devices with various driving mechanisms such as electrostatic, electrothermal, electromagnetic, piezoelectric, etc.