Active standard | Published: 22/02/2024

IEC 62047-44-ed.1.0

Semiconductor devices - Micro-electromechanical devices - Part 44: Test methods for dynamic performances of MEMS resonant electric-field-sensitive devices

Available languages: English

Available design: electronic design (pdf), Print design, CD-ROM

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Detail information

Designation: IEC 62047-44-ed.1.0

Publication date: 22/02/2024

Pages: 19

Country: International technical standard

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Anotation

IEC 62047-44:2024 describes terminology, definitions and test methods that are used to evaluate and determine the dynamic performance of MEMS (Micro-Electromechanical Systems) resonant electric-field-sensitive devices. It also specifies sample requirements and test equipment for dynamic performances of MEMS resonant electric-field-sensitive devices. The statements made in this document are also applicable to MEMS resonant electric-field-sensitive devices with various driving mechanisms such as electrostatic, electrothermal, electromagnetic, piezoelectric, etc.

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