UNE - Spanish national standards

Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson´s ratio of thin film MEMS materials (Endorsed by AENOR in November of 2014.)

Available languages: English

Available design: electronic design (pdf), Print design

Semiconductor devices - Micro-electromechanical devices - Part 22: Electromechanical tensile test method for conductive thin films on flexible substrates (Endorsed by AENOR in November of 2014.)

Available languages: English

Available design: electronic design (pdf), Print design

Semiconductor devices - Micro-electromechanical devices - Part 25: Silicon based MEMS fabrication technology - Measurement method of pull-press and shearing strength of micro bonding area (Endorsed by Asociación Espanola de Normalización in January of 2017.)

Available languages: English

Available design: electronic design (pdf), Print design

Semiconductor devices - Micro-electromechanical devices - Part 26: Description and measurement methods for micro trench and needle structures (Endorsed by AENOR in June of 2016.)

Available languages: English

Available design: electronic design (pdf), Print design

Semiconductor devices - Micro-electromechanical devices -- Part 3: Thin film standard test piece for tensile testing (IEC 62047-3:2006) (Endorsed by AENOR in January of 2007.)

Available languages: English

Available design: electronic design (pdf), Print design

Semiconductor devices - Micro-electromechanical devices -- Part 4: Generic specification for MEMS (Endorsed by AENOR in February of 2011.)

Available languages: English

Available design: electronic design (pdf), Print design

Semiconductor devices - Micro-electromechanical devices - Part 5: RF MEMS switches (Endorsed by AENOR in November of 2011.)

Available languages: English

Available design: electronic design (pdf), Print design

Semiconductor devices - Micro-electromechanical devices -- Part 6: Axial fatigue testing methods of thin film materials (Endorsed by AENOR in June of 2010.)

Available languages: English

Available design: electronic design (pdf), Print design

Semiconductor devices - Micro-electromechanical devices - Part 7: MEMS BAW filter and duplexer for radio frequency control and selection (Endorsed by AENOR in November of 2011.)

Available languages: English

Available design: electronic design (pdf), Print design

Semiconductor devices - Micro-electromechanical devices - Part 8: Strip bending test method for tensile property measurement of thin films (Endorsed by AENOR in September of 2011.)

Available languages: English

Available design: electronic design (pdf), Print design