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Withdrawn | Published: 15/09/1991
ASTM E1438-91(2001) Withdrawn
Standard Guide for Measuring Widths of Interfaces in Sputter Depth Profiling Using SIMS
Available languages: English
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Detail information
Designation: ASTM E1438-91(2001)
Publication date: 15/09/1991
Pages: 2
Note: Withdrawn
Country: American technical standard
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You can buy at www.mystandards.bizAnotation
Keywords:data analysis-spectrochemical, depth resolution, interface width, profile distortion, secondary ion mass spectrometry (SIMS), ICS Number Code 29.045 (Semiconducting materials)
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