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Withdrawn | Published: 10/10/2002
ASTM E2244-02 Withdrawn
Standard Test Method for In-Plane Length Measurements of Thin, Reflecting Films Using an Optical Interferometer
Available languages: English
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Detail information
Designation: ASTM E2244-02
Publication date: 10/10/2002
Pages: 9
Note: Withdrawn
Country: American technical standard
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Keywords:cantilevers, combined standard uncertainty, deflection measurements, fixed-fixed beams, interferometry, length measurements, microelectromechanical systems, MEMS, polysilicon, residual strain, strain gradient, test structure, ICS Number Code 37.040.20 (Photographic paper, film and plates. Cartridges)
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