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Withdrawn | Published: 10/12/2002
ASTM F1049-02 Withdrawn
Standard Practice for Shallow Etch Pit Detection on Silicon Wafers (Withdrawn 2003
Available languages: English
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Detail information
Designation: ASTM F1049-02
Publication date: 10/12/2002
Pages: 4
Note: Withdrawn
Country: American technical standard
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Keywords:epitaxial, oxidation, preferential etch, saucer pit, shallow etch pit, silicon, ICS Number Code 29.045 (Semiconducting materials)
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