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Withdrawn | Published: 10/12/1999
ASTM F1238-95(2003) Withdrawn
Standard Specification for Refractory Silicide Sputtering Targets for Microelectronic Applications
Available languages: English
Available design: Online Secure PDF
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Detail information
Designation: ASTM F1238-95(2003)
Publication date: 10/12/1999
Pages: 2
Note: Withdrawn
Country: American technical standard
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Keywords:density, microelectronics, molybdenum, disilicide, refractory silicides, sputtering, sputtering targets, tantalum disilicide, titanium disilicide, tungsten disilicide, ICS Number Code 31.100 (Electronic tubes)
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