Withdrawn | Published: 01/01/2005

ASTM F1398-93(2005) Withdrawn

Standard Test Method for Determination of Total Hydrocarbon Contribution by Gas Distribution System Components

Available languages: English

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Detail information

Designation: ASTM F1398-93(2005)

Publication date: 01/01/2005

Pages: 10

Note: Withdrawn

Country: American technical standard

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Keywords:
Argon, Condensable hydrocarbons, Contamination, Flame ionization detectors (FID), Flow and flow rate-semiconductor applications, Gas distribution systems, Hydrocarbons, Instrumental measurement, Mass flow controller (MFC), Methane (CH[inf]4[reset]) equivalent, Minimum detection limit (MDL), Nitrogen, Noncondensable hydrocarbons, Semiconductor clean rooms, Spectrometry-mass, Spool piece, Stainless steel-gas distribution systems, Total hydrocarbons (THC)

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