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Active standard | Published: 31/07/2015
BS EN 62047-16:2015
Semiconductor devices. Micro-electromechanical devices. Test methods for determining residual stresses of MEMS films. Wafer curvature and cantilever beam deflection methods.
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Detail information
Designation: BS EN 62047-16:2015
Publication date: 31/07/2015
Pages: 18
Country: British technical standard
Where to buy?
You can buy at www.mystandards.bizAnotation
ISBN: 978 0 580 78080 6 Status: DefinitivePopular Publishers
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