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Active standard | Published: 19/06/2019
BS ISO 21859:2019
Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment.
Available languages: English
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Detail information
Designation: BS ISO 21859:2019
Publication date: 19/06/2019
Pages: 12
Country: British technical standard
Where to buy?
You can buy at www.mystandards.bizAnotation
ISBN: 978 0 580 96201 1 Status: ConfirmedPopular Publishers
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