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Active standard | Published: 01/04/2023
ČSN EN ISO 23131
Ellipsometry - Principles
Available languages: English
Available design: Print design
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Detail information
Designation: ČSN EN ISO 23131
Publication date: 01/04/2023
Pages: 28
Country: Czech technical standard
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This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories.It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3
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