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Active standard | Published: 29/09/2024
GB/T 44517-2024
Micro-electromechanical systems (MEMS) technology—Wafer curvature and cantilever beam deflection test methods for determining residual stresses of MEMS films
Available languages: English, Chinese
Available design: electronic design (pdf), Print design
from 328.80 USD
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Detail information
Designation: GB/T 44517-2024
Publication date: 29/09/2024
Pages: 0
Country: Chinese technical standard
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