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Active standard | Published: 01/01/2012
GOST R 8.716-2010
State system for ensuring the uniformity of measurements. Reflectometers of the extreme ultraviolet radiation for measurements of the characteristics of multilayer nanostructures in the wavelength range 10 to 30 nm. Procedure of measurements
Available languages: English and Russian, Russian
Available design: electronic design (pdf), Print design
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Detail information
Designation: GOST R 8.716-2010
Publication date: 01/01/2012
Pages: 12
Country: Russian technical standard
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