Active standard | Published: 30/09/2015

IEC/IEEE 62659-ed.1.0

Nanomanufacturing - Large scale manufacturing for nanoelectronics

Available languages: English

Available design: electronic design (pdf), Print design, CD-ROM

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Detail information

Designation: IEC/IEEE 62659-ed.1.0

Publication date: 30/09/2015

Pages: 12

Country: International technical standard

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Anotation

IEC/IEEE 62659:2015(E) provides a framework for introducing nanoelectronics into large scale, high volume production in semiconductor manufacturing facilities through the incorporation of nanomaterials (e.g. carbon nanotubes, graphene, quantum dots, etc.). Since semiconductor manufacturing facilities need to incorporate practices that maintain high yields, there are very strict requirements for how manufacturing is performed. Nanomaterials represent a potential contaminant in semiconductor manufacturing facilities and need to be introduced in a structured and methodical way.

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