IEC/IEEE 62659-ed.1.0

Podrobné informace

Označení: IEC/IEEE 62659-ed.1.0

Datum vydání: 30.09.2015

Stran: 12

Země: Mezinárodní technická norma

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Anotace

IEC/IEEE 62659:2015(E) provides a framework for introducing nanoelectronics into large scale, high volume production in semiconductor manufacturing facilities through the incorporation of nanomaterials (e.g. carbon nanotubes, graphene, quantum dots, etc.). Since semiconductor manufacturing facilities need to incorporate practices that maintain high yields, there are very strict requirements for how manufacturing is performed. Nanomaterials represent a potential contaminant in semiconductor manufacturing facilities and need to be introduced in a structured and methodical way.