Active standard | Published: 14/10/2021

IEC/TS 62607-9-1-ed.1.0

Nanomanufacturing - Key control characteristics - Part 9-1: Traceable spatially resolved nano-scale stray magnetic field measurements - Magnetic force microscopy

Available languages: English

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Detail information

Designation: IEC/TS 62607-9-1-ed.1.0

Publication date: 14/10/2021

Pages: 63

Country: International technical standard

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Anotation

IEC TS 62607-9-1:2021(E) establishes a standardized method to characterize spatially varying magnetic fields with a spatial resolution down to 10 nm for flat magnetic specimens by magnetic force microscopy (MFM). MFM primarily detects the stray field component perpendicular to the sample surface. The resolution is achieved by the calibration of the MFM tip using magnetically nanostructured reference materials.

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