Active standard | Published: 24/01/2019

IEC 62047-32-ed.1.0

Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonators
(Dispositifs a semiconducteurs - Dispositifs microelectromecaniques - Partie 32: Methode d’essai pour la vibration non lineaire des resonateurs MEMS)

Available languages: English and French

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Detail information

Designation: IEC 62047-32-ed.1.0

Publication date: 24/01/2019

Pages: 37

Country: International technical standard

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Anotation

IEC 62047-32:2019 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators. L’IEC 62047-32:2019 specifie la methode d’essai et les conditions d’essai pour la vibration non lineaire des resonateurs MEMS. Les enonces du present document s’appliquent au developpement et a la fabrication des resonateurs MEMS.

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