Active standard | Published: 19/06/2025

ISO 11505:2025-ed.2.0

Surface chemical analysis — General procedures for quantitative compositional depth profiling by glow discharge optical emission spectrometry
(Analyse chimique des surfaces — Modes opératoires généraux pour le profilage en profondeur compositionnel quantitatif par spectrométrie d´émission optique a décharge luminescente)

Available languages: English

Available design: electronic design (pdf), Print design

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Detail information

Designation: ISO 11505:2025-ed.2.0

Publication date: 19/06/2025

Pages: 34

Country: International technical standard

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Anotation

Description / Abstract: This document specifies a glow discharge optical emission spectrometric (GD-OES) method for the determination of the thickness, mass per unit area and chemical composition of surface layer films. The applicability of this document is limited to description of general procedures for quantification of the chemical composition and thickness in GD-OES compositional depth profiling. This document is not directly applicable for quantification of individual materials having various thicknesses and elements to be determined.

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