Active standard | Published: 20/08/2015

ISO 13083:2015

Surface chemical analysis — Scanning probe microscopy — Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes
(Analyse chimique des surfaces - Microscopie a sonde a balayage - Normes sur la définition et l´étalonnage de la résolution spatiale des microscopes électriques a sonde a balayage (ESPMs) comme SSRM et SCM pour l´imagerie 2D-dopant et d´autres fins)

Available languages: English

Available design: electronic design (pdf), Print design

from 149.50 USD show on eshop

Detail information

Designation: ISO 13083:2015

Publication date: 20/08/2015

Pages: 14

Country: International technical standard

Where to buy?

You can buy at www.mystandards.biz

Anotation

Description / Abstract: ISO 13083:2015 describes a method for measuring the spatial (lateral) resolution of scanning capacitance microscopes (SCMs) or scanning spreading resistance microscopes (SSRMs), which are widely used in imaging the distribution of carriers and other electrical properties in semiconductor devices. The method involves the use of a sharp-edged artefact.

Popular Publishers

full catalog