Active standard | Published: 09/03/2018

ISO 20411:2018

Surface chemical analysis — Secondary ion mass spectrometry — Correction method for saturated intensity in single ion counting dynamic secondary ion mass spectrometry
(Analyse chimique des surfaces — Spectrométrie de masse des ions secondaires — Méthode de correction de l´intensité de saturation en SIMS dynamique a comptage d´ions individuel)

Available languages: English

Available design: electronic design (pdf), Print design

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Detail information

Designation: ISO 20411:2018

Publication date: 09/03/2018

Pages: 15

Country: International technical standard

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Anotation

Description / Abstract: ISO 20411:2018 specifies a method for determining the maximum count rate for an acceptable limit of divergence from linearity of the intensity scale in pulse counting magnetic sector-type secondary ion mass spectrometers or quadrupole secondary ion mass spectrometers. It uses a test based on depth profile analysis of two isotopes in a reference material which has a gradual concentration change between low and high concentration regimes. It also includes a correction method for saturated intensity caused by the dead time of the detector. The correction can increase the intensity range for 95 % linearity so that a higher maximum count rate can be employed for those spectrometers for which the relevant correction equations have been shown to be valid. ISO 20411:2018 does not apply to time of flight mass spectrometers. ISO 20411:2018 is only applicable to elements with minor isotopes. It is not applicable if the element is monoisotopic or contains isotopes with equal abundances.

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