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Active standard | Published: 20/01/2026
JIS K0148:2026
Surface chemical analysis-Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy
Available languages: Japanese
Available design: electronic design (pdf), Print design
from 8 475.20 USD
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Detail information
Designation: JIS K0148:2026
Publication date: 20/01/2026
Pages: 28
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