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Active standard | Published: 01/11/2013
UNE-EN 62047-11:2013
Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems (Endorsed by AENOR in November of 2013.)
Available languages: English
Available design: electronic design (pdf), Print design
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Detail information
Designation: UNE-EN 62047-11:2013
Publication date: 01/11/2013
Pages: 23
Country: Spanish technical standard
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