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Active standard | Published: 01/02/2012
UNE-EN 62047-12:2011
Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures (Endorsed by AENOR in February of 2012.)
Available languages: English
Available design: electronic design (pdf), Print design
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Detail information
Designation: UNE-EN 62047-12:2011
Publication date: 01/02/2012
Pages: 33
Country: Spanish technical standard
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