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Active standard | Published: 01/11/2014
UNE-EN 62047-21:2014
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson´s ratio of thin film MEMS materials (Endorsed by AENOR in November of 2014.)
Available languages: English
Available design: electronic design (pdf), Print design
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Detail information
Designation: UNE-EN 62047-21:2014
Publication date: 01/11/2014
Pages: 17
Country: Spanish technical standard
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